● 高度規
● 精密二次元電子高度規 |
TESA MICRO-HITE | PLUS M350 | PLUS M600 | PLUS M900 |
量測範圍 | 365mm | 615mm | 920mm |
應用範圍 | 520/745mm | 770/995mm | 1075/1300mm |
量測精度** | (2+1.5L)µm | (2+1.5L)µm | (2+1.5L)µm |
重複性 | On plan : 25 =<0.5µm – On hole : 25=<1µm | ||
垂直度 | <6µm | <8µm | <12µm |